Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12332571 | Target control in extreme ultraviolet lithography systems using aberration of reflection image | Han-Lung Chang, Shi-Han SHANN, Li-Jui Chen, Yen-Shuo Su | 2025-06-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12332571 | Target control in extreme ultraviolet lithography systems using aberration of reflection image | Han-Lung Chang, Shi-Han SHANN, Li-Jui Chen, Yen-Shuo Su | 2025-06-17 |