Issued Patents 2025
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12347997 | Methods and systems for aligning master oscillator power amplifier systems | Chun-Lin Chang, Henry Tong Yee Shian, Alan Tu, Tzung-Chi Fu, Bo-Tsun Liu +2 more | 2025-07-01 |
| 12332571 | Target control in extreme ultraviolet lithography systems using aberration of reflection image | Ting-Ya CHENG, Shi-Han SHANN, Li-Jui Chen, Yen-Shuo Su | 2025-06-17 |
| 12302484 | Droplet generator and method of servicing extreme ultraviolet imaging tool | Wei-Chih Lai, Bo-Tsun Liu, Li-Jui Chen, Po-Chung Cheng | 2025-05-13 |
| 12298664 | Advanced load port for photolithography mask inspection tool | Tung-Jung Chang, Jen-Yang Chung | 2025-05-13 |
| 12189311 | Reticle carrier and associated methods | Yen-Hsun Chen, Yi-Zhen Chen, Jhan-Hong YEH, Tzung-Chi Fu, Li-Jui Chen | 2025-01-07 |
| 12193136 | Apparatus and method for generating extreme ultraviolet radiation | Wei-Chih Lai, Chi-Ming Yang, Shang-Chieh Chien, Bo-Tsun Liu, Li-Jui Chen +1 more | 2025-01-07 |