Issued Patents 2025
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12347997 | Methods and systems for aligning master oscillator power amplifier systems | Chun-Lin Chang, Henry Tong Yee Shian, Alan Tu, Han-Lung Chang, Tzung-Chi Fu +2 more | 2025-07-01 |
| 12302484 | Droplet generator and method of servicing extreme ultraviolet imaging tool | Wei-Chih Lai, Han-Lung Chang, Li-Jui Chen, Po-Chung Cheng | 2025-05-13 |
| 12235594 | Method for performing lithography process, light source, and EUV lithography system | Chi-Ming Yang, Ssu-Yu Chen, Shang-Chieh Chien, Chieh Hsieh, Tzung-Chi Fu +2 more | 2025-02-25 |
| 12193136 | Apparatus and method for generating extreme ultraviolet radiation | Wei-Chih Lai, Han-Lung Chang, Chi-Ming Yang, Shang-Chieh Chien, Li-Jui Chen +1 more | 2025-01-07 |