Issued Patents 2025
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12379675 | Extreme ultraviolet lithography system | Po-Chung Cheng, Li-Jui Chen, Che-Chang Hsu, Chi-Ming Yang | 2025-08-05 |
| 12282262 | Method for controlling extreme ultraviolet light | Shang-Chieh Chien, Li-Jui Chen | 2025-04-22 |
| 12235594 | Method for performing lithography process, light source, and EUV lithography system | Chi-Ming Yang, Shang-Chieh Chien, Chieh Hsieh, Tzung-Chi Fu, Bo-Tsun Liu +2 more | 2025-02-25 |
| 12207381 | Extreme ultraviolet lithography system with heated tin vane bucket having a heated cover | Shang-Chieh Chien, Li-Jui Chen | 2025-01-21 |