Issued Patents 2025
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400915 | Metrology method | Su-Horng Lin | 2025-08-26 |
| 12379675 | Extreme ultraviolet lithography system | Ssu-Yu Chen, Po-Chung Cheng, Li-Jui Chen, Che-Chang Hsu | 2025-08-05 |
| 12321100 | Semiconductor lithography system and/or method | Tsiao-Chen Wu, Hsu-Shui Liu | 2025-06-03 |
| 12317576 | Method for forming a semiconductor structure using dehydrating chemical, and method for forming a semiconductor structure | Chung-Chieh Lee, Chyi Shyuan Chern | 2025-05-27 |
| 12292687 | Width adjustment of EUV radiation beam | Tsung-Hsun Lee, Jian-Yuan Su, Ching-Juinn Huang, Po-Chung Cheng | 2025-05-06 |
| 12271113 | Method of manufacturing a semiconductor device | Chih-Cheng Liu, Yi-Chen Kuo, Jia-Lin WEI, Ming-Hui Weng, Yen-Yu Chen +4 more | 2025-04-08 |
| 12272554 | Method of manufacturing a semiconductor device | Jia-Lin WEI, Ming-Hui Weng, Chih-Cheng Liu, Yi-Chen Kuo, Yen-Yu Chen +4 more | 2025-04-08 |
| 12235594 | Method for performing lithography process, light source, and EUV lithography system | Ssu-Yu Chen, Shang-Chieh Chien, Chieh Hsieh, Tzung-Chi Fu, Bo-Tsun Liu +2 more | 2025-02-25 |
| 12222643 | Method of manufacturing a semiconductor device and pattern formation method | Chih-Cheng Liu, Ming-Hui Weng, Jr-Hung Li, Yahru Cheng, Tze-Liang Lee +1 more | 2025-02-11 |
| 12193136 | Apparatus and method for generating extreme ultraviolet radiation | Wei-Chih Lai, Han-Lung Chang, Shang-Chieh Chien, Bo-Tsun Liu, Li-Jui Chen +1 more | 2025-01-07 |