Issued Patents 2025
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12412760 | EFEM robot auto teaching methodology | Chien-Fa Lee, Jiun-Rong Pai, Shou-Wen Kuo | 2025-09-09 |
| 12346034 | Method and system of removing particles from pellicle | Cheng-Kang Hu, Yin-Yuan Chen, Ya-Chieh WEN, Jiun-Rong Pai | 2025-07-01 |
| 12334373 | Apparatus and method for inspecting wafer carriers | Cheng-Kang Hu, Shou-Wen Kuo, Sheng-Hsiang Chuang, Jiun-Rong Pai | 2025-06-17 |
| 12321100 | Semiconductor lithography system and/or method | Tsiao-Chen Wu, Chi-Ming Yang | 2025-06-03 |
| 12282318 | Semiconductor wafer cooling | Yung-Yao Lee, Cheng-Kang Hu, Jui-Chun Peng | 2025-04-22 |
| 12283506 | Humidity control device for equipment front end module of semiconductor processing or characterization tool | Ren-Hau Wu, Cheng-Kang Hu, Yi-Fam Shiu, Cheng-Lung Wu | 2025-04-22 |
| 12191185 | Vacuum wafer chuck for manufacturing semiconductor devices | Chien-Fa Lee, Chin-Lin CHOU, Shang-Ying Tsai, Shou-Wen Kuo, Kuei-Sung Chang +2 more | 2025-01-07 |