Issued Patents 2025
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12412760 | EFEM robot auto teaching methodology | Chien-Fa Lee, Hsu-Shui Liu, Jiun-Rong Pai | 2025-09-09 |
| 12378668 | Gas tube, gas supply system and manufacturing method of semiconductor device using the same | Yi-Shiung Chen, Cheng-Yi Huang, Chih-Shen Yang, Po-Wen Chai | 2025-08-05 |
| 12334373 | Apparatus and method for inspecting wafer carriers | Cheng-Kang Hu, Sheng-Hsiang Chuang, Jiun-Rong Pai, Hsu-Shui Liu | 2025-06-17 |
| 12216407 | Method and apparatus for multi-spray RRC process with dynamic control | Ming-Hsuan Chuang, Po-Sheng Lu, Cheng-Yi Huang, Chia-Hung Chu | 2025-02-04 |
| 12191185 | Vacuum wafer chuck for manufacturing semiconductor devices | Chien-Fa Lee, Chin-Lin CHOU, Shang-Ying Tsai, Kuei-Sung Chang, Jiun-Rong Pai +2 more | 2025-01-07 |