Issued Patents 2025
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400313 | Optical inspection of a wafer | Chih-Lieh Chen, Cheng-Lung Wu, Jiun-Rong Pai | 2025-08-26 |
| 12346034 | Method and system of removing particles from pellicle | Yin-Yuan Chen, Ya-Chieh WEN, Hsu-Shui Liu, Jiun-Rong Pai | 2025-07-01 |
| 12334373 | Apparatus and method for inspecting wafer carriers | Shou-Wen Kuo, Sheng-Hsiang Chuang, Jiun-Rong Pai, Hsu-Shui Liu | 2025-06-17 |
| 12322628 | Apparatus and method for automated wafer carrier handling | Ren-Hau Wu, Cheng-Lung Wu, Jiun-Rong Pai | 2025-06-03 |
| 12282318 | Semiconductor wafer cooling | Yung-Yao Lee, Jui-Chun Peng, Hsu-Shui Liu | 2025-04-22 |
| 12283506 | Humidity control device for equipment front end module of semiconductor processing or characterization tool | Ren-Hau Wu, Yi-Fam Shiu, Cheng-Lung Wu, Hsu-Shui Liu | 2025-04-22 |