Issued Patents 2025
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400834 | Cantilever with etch chamber flow design | Chien-Liang Chen, Chien-Yu Wang, Wei Chen, Yu-Ning Cheng, Shih-Tsung Chen | 2025-08-26 |
| 12362160 | Method for forming layer | Hsin-Liang Chen, Wen-Chih Wang, Chia-Hung Liao, Cheng-Chieh Chen, Yi-Ming Yeh +1 more | 2025-07-15 |
| 12306542 | Immersion exposure tool | — | 2025-05-20 |
| 12292686 | Semiconductor structure and manufacturing method thereof | Yi-Ping Hsieh | 2025-05-06 |
| 12282318 | Semiconductor wafer cooling | Cheng-Kang Hu, Jui-Chun Peng, Hsu-Shui Liu | 2025-04-22 |
| 12242199 | Method of using wafer stage | Wei-Chih Lin, Chih-Chien Lin | 2025-03-04 |
| 12235582 | Semiconductor developer tool and methods of operation | Chen Yi Hsu | 2025-02-25 |
| 12191127 | Apparatus for physical vapor deposition and method for forming a layer | Hsin-Liang Chen, Wen-Chih Wang, Chia-Hung Liao, Cheng-Chieh Chen, Yi-Ming Yeh +1 more | 2025-01-07 |
| 12191146 | Method of manufacturing semiconductor structure | Chen Yi Hsu, Wei-Hsiang Tseng | 2025-01-07 |
| 12189306 | Method and system of surface topography measurement for lithography | Yeh-Chin Wang, Yang-Ann Chu, Yung-Hsiang Chen, Yung-Cheng Chen | 2025-01-07 |