Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12429783 | EUV lithography apparatus and operating method for mitigating contamination | I-Hsiung Huang, Tung-Li Wu | 2025-09-30 |
| 12276906 | Methods for cleaning lithography mask | I-Hsiung Huang, Chi-Lun Lu | 2025-04-15 |
| 12189306 | Method and system of surface topography measurement for lithography | Yung-Yao Lee, Yeh-Chin Wang, Yang-Ann Chu, Yung-Hsiang Chen | 2025-01-07 |