Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12429783 | EUV lithography apparatus and operating method for mitigating contamination | Yung-Cheng Chen, Tung-Li Wu | 2025-09-30 |
| 12276906 | Methods for cleaning lithography mask | Yung-Cheng Chen, Chi-Lun Lu | 2025-04-15 |