Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12354867 | Particle removal apparatus | Siao-Chian Huang, Po-Chung Cheng, Tzung-Chi Fu, Tsung-Yen Lee | 2025-07-08 |
| 12292687 | Width adjustment of EUV radiation beam | Chi-Ming Yang, Tsung-Hsun Lee, Jian-Yuan Su, Po-Chung Cheng | 2025-05-06 |