Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12372886 | Acoustic particle deflection in lithography tool | Tai-Yu Chen, Sheng-Kang Yu, Kai Tak Lam, Shang-Chieh Chien | 2025-07-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12372886 | Acoustic particle deflection in lithography tool | Tai-Yu Chen, Sheng-Kang Yu, Kai Tak Lam, Shang-Chieh Chien | 2025-07-29 |