Issued Patents 2025
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12405529 | Lithography system and methods | Sheng-Kang Yu, Shang-Chieh Chien, Heng-Hsin Liu, Li-Jui Chen | 2025-09-02 |
| 12372880 | System and method for detecting debris in a photolithography system | Shang-Chieh Chien, Tzu-Jung Pan, Wei-Shin Cheng, Li-Jui Chen, Heng-Hsin Liu | 2025-07-29 |
| 12360458 | Radiation collector | Sheng-Kang Yu, Shang-Chieh Chien, Heng-Hsin Liu, Li-Jui Chen | 2025-07-15 |
| 12353142 | Semiconductor processing tool and methods of operation | Sheng-Kang Yu, Shang-Chieh Chien, Heng-Hsin Liu, Li-Jui Chen | 2025-07-08 |
| 12287572 | Lithography system and methods | Sheng-Kang Yu, Shang-Chieh Chien, Heng-Hsin Liu, Li-Jui Chen | 2025-04-29 |
| 12228863 | EUV light source contamination monitoring system | Sheng-Kang Yu, Heng-Hsin Liu, Li-Jui Chen, Shang-Chieh Chien | 2025-02-18 |