Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12372880 | System and method for detecting debris in a photolithography system | Shang-Chieh Chien, Tzu-Jung Pan, Cheng-Hung Tsai, Li-Jui Chen, Heng-Hsin Liu | 2025-07-29 |
| 12235586 | EUV photolithography system fuel source and methods of operating the same | Cheng-Hao LAI, Ming-Hsun Tsai, Hsin-Feng Chen, Yu-Kuang SUN, Cheng-Hsuan Wu +6 more | 2025-02-25 |