Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12405541 | Methods of servicing photolithographic apparatus | Yu-Huan Chen, Cheng-Hsuan Wu, Shang-Chieh Chien, Li-Jui Chen | 2025-09-02 |
| 12354921 | Wafer structure including probe marked test pads | Chun-Lin Lu, Shou-Zen Chang, Ying-Tsung Chu | 2025-07-08 |
| 12235586 | EUV photolithography system fuel source and methods of operating the same | Cheng-Hao LAI, Hsin-Feng Chen, Wei-Shin Cheng, Yu-Kuang SUN, Cheng-Hsuan Wu +6 more | 2025-02-25 |