Issued Patents 2024
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12142484 | Etching method | Takahiro Yokoyama, Yoshihide Kihara, Ryutaro SUDA, Takatoshi Orui | 2024-11-12 |
| 12112954 | Etching method, substrate processing apparatus, and substrate processing system | Tomohiko NIIZEKI, Takayuki Katsunuma, Hironari Sasagawa, Yuta NAKANE, Shinya Ishikawa +4 more | 2024-10-08 |
| 12062522 | Plasma etching method and plasma etching apparatus | Keiji Kitagaito, Fumiya Kobayashi | 2024-08-13 |
| 12051570 | Plasma processing apparatus | Ryohei TAKEDA, Ryuichi TAKASHIMA, Yoshinobu Ooya | 2024-07-30 |
| 11996296 | Substrate processing method and substrate processing system | Kae KUMAGAI, Ryutaro SUDA, Kenji Ouchi, Hiroki Murakami, Munehito KAGAYA +1 more | 2024-05-28 |
| 11961746 | Substrate processing method and substrate processing apparatus | Sho Kumakura, Hironari Sasagawa, Yoshihide Kihara | 2024-04-16 |