Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12020900 | Plasma processing device, and plasma processing method | Satoru Kawakami, Tsuyoshi Moriya, Tatsuo Matsudo, Jun Yamawaku, Hiroyuki Onoda | 2024-06-25 |
| 11996296 | Substrate processing method and substrate processing system | Kae KUMAGAI, Ryutaro SUDA, Maju TOMURA, Kenji Ouchi, Hiroki Murakami +1 more | 2024-05-28 |