Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11996296 | Substrate processing method and substrate processing system | Kae KUMAGAI, Ryutaro SUDA, Maju TOMURA, Hiroki Murakami, Munehito KAGAYA +1 more | 2024-05-28 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11996296 | Substrate processing method and substrate processing system | Kae KUMAGAI, Ryutaro SUDA, Maju TOMURA, Hiroki Murakami, Munehito KAGAYA +1 more | 2024-05-28 |