Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12142484 | Etching method | Takahiro Yokoyama, Maju TOMURA, Yoshihide Kihara, Takatoshi Orui | 2024-11-12 |
| 11996296 | Substrate processing method and substrate processing system | Kae KUMAGAI, Maju TOMURA, Kenji Ouchi, Hiroki Murakami, Munehito KAGAYA +1 more | 2024-05-28 |