Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12142484 | Etching method | Takahiro Yokoyama, Maju TOMURA, Ryutaro SUDA, Takatoshi Orui | 2024-11-12 |
| 12071687 | Plasma processing method and plasma processing apparatus | Michiko Nakaya, Toru Hisamatsu, Shinya Ishikawa, Sho Kumakura, Masanobu Honda | 2024-08-27 |
| 11961746 | Substrate processing method and substrate processing apparatus | Sho Kumakura, Hironari Sasagawa, Maju TOMURA | 2024-04-16 |
| 11955337 | Substrate processing method and substrate processing system | Toru Hisamatsu, Takayuki Katsunuma, Shinya Ishikawa, Masanobu Honda | 2024-04-09 |