Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12071687 | Plasma processing method and plasma processing apparatus | Michiko Nakaya, Shinya Ishikawa, Sho Kumakura, Masanobu Honda, Yoshihide Kihara | 2024-08-27 |
| 12074009 | Apparatus for processing a substrate | Yuki Iijima, Kae KUMAGAI | 2024-08-27 |
| 11955337 | Substrate processing method and substrate processing system | Takayuki Katsunuma, Shinya Ishikawa, Yoshihide Kihara, Masanobu Honda | 2024-04-09 |