Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12112954 | Etching method, substrate processing apparatus, and substrate processing system | Maju TOMURA, Tomohiko NIIZEKI, Takayuki Katsunuma, Hironari Sasagawa, Yuta NAKANE +4 more | 2024-10-08 |
| 12071687 | Plasma processing method and plasma processing apparatus | Michiko Nakaya, Toru Hisamatsu, Sho Kumakura, Masanobu Honda, Yoshihide Kihara | 2024-08-27 |
| 11961755 | Substrate support and substrate processing apparatus | — | 2024-04-16 |
| 11955337 | Substrate processing method and substrate processing system | Toru Hisamatsu, Takayuki Katsunuma, Yoshihide Kihara, Masanobu Honda | 2024-04-09 |