Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12112954 | Etching method, substrate processing apparatus, and substrate processing system | Maju TOMURA, Tomohiko NIIZEKI, Takayuki Katsunuma, Hironari Sasagawa, Shinya Ishikawa +4 more | 2024-10-08 |
| 12100578 | Substrate processing method | Sho Kumakura | 2024-09-24 |