Issued Patents 2024
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12125710 | Substrate processing method and substrate processing apparatus | Yusuke TAKINO | 2024-10-22 |
| 12112954 | Etching method, substrate processing apparatus, and substrate processing system | Maju TOMURA, Tomohiko NIIZEKI, Takayuki Katsunuma, Hironari Sasagawa, Yuta NAKANE +4 more | 2024-10-08 |
| 12100578 | Substrate processing method | Yuta NAKANE | 2024-09-24 |
| 12071687 | Plasma processing method and plasma processing apparatus | Michiko Nakaya, Toru Hisamatsu, Shinya Ishikawa, Masanobu Honda, Yoshihide Kihara | 2024-08-27 |
| 11961746 | Substrate processing method and substrate processing apparatus | Hironari Sasagawa, Maju TOMURA, Yoshihide Kihara | 2024-04-16 |
| 11862441 | Plasma processing method and plasma processing apparatus | Hironari Sasagawa | 2024-01-02 |