Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12125710 | Substrate processing method and substrate processing apparatus | Sho Kumakura | 2024-10-22 |
| 12112954 | Etching method, substrate processing apparatus, and substrate processing system | Maju TOMURA, Tomohiko NIIZEKI, Takayuki Katsunuma, Hironari Sasagawa, Yuta NAKANE +4 more | 2024-10-08 |
| 12009219 | Substrate processing method | Takayuki Hoshi | 2024-06-11 |