Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12112954 | Etching method, substrate processing apparatus, and substrate processing system | Maju TOMURA, Takayuki Katsunuma, Hironari Sasagawa, Yuta NAKANE, Shinya Ishikawa +4 more | 2024-10-08 |
| 11922307 | Learning device, inference device, and learned model | Kosuke NAKAGO, Daisuke MOTOKI, Masaki Watanabe, Tomoki Komatsu, Hironori MOKI +2 more | 2024-03-05 |