Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12112954 | Etching method, substrate processing apparatus, and substrate processing system | Maju TOMURA, Tomohiko NIIZEKI, Takayuki Katsunuma, Yuta NAKANE, Shinya Ishikawa +4 more | 2024-10-08 |
| 11961746 | Substrate processing method and substrate processing apparatus | Sho Kumakura, Maju TOMURA, Yoshihide Kihara | 2024-04-16 |
| 11862441 | Plasma processing method and plasma processing apparatus | Sho Kumakura | 2024-01-02 |