Issued Patents 2024
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12154792 | Plasma etching method | — | 2024-11-26 |
| 12112954 | Etching method, substrate processing apparatus, and substrate processing system | Maju TOMURA, Tomohiko NIIZEKI, Hironari Sasagawa, Yuta NAKANE, Shinya Ishikawa +4 more | 2024-10-08 |
| 11969575 | Medical infusion pump, method of controlling medical infusion pump, and medical infusion pump system | Takafumi Nomura | 2024-04-30 |
| 11955316 | Substrate processing method, method for manufacturing semiconducor device, and plasma processing apparatus | Daisuke Nishide | 2024-04-09 |
| 11955337 | Substrate processing method and substrate processing system | Toru Hisamatsu, Shinya Ishikawa, Yoshihide Kihara, Masanobu Honda | 2024-04-09 |