Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12074009 | Apparatus for processing a substrate | Yuki Iijima, Toru Hisamatsu | 2024-08-27 |
| 11996296 | Substrate processing method and substrate processing system | Ryutaro SUDA, Maju TOMURA, Kenji Ouchi, Hiroki Murakami, Munehito KAGAYA +1 more | 2024-05-28 |