Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12060635 | Hard mask, substrate processing method, and substrate processing apparatus | Tadahiro Ishizaka, Yoshinori Morisada | 2024-08-13 |
| 12027344 | Film forming apparatus | Shinya Iwashita, Ayuta Suzuki, Takahiro SHINDO, Kazuki DEMPOH, Tatsuo Matsudo +2 more | 2024-07-02 |
| 12020900 | Plasma processing device, and plasma processing method | Munehito KAGAYA, Satoru Kawakami, Tatsuo Matsudo, Jun Yamawaku, Hiroyuki Onoda | 2024-06-25 |
| 11993849 | Carbon hard mask, film forming apparatus, and film forming method | Masaru Hori, Makoto Sekine, Hirotsugu Sugiura, Satoshi Tanaka, Yoshinori Morisada | 2024-05-28 |