Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12125700 | Method of forming high aspect ratio features | Mitsuya Utsuno, Yoshio Susa | 2024-10-22 |
| 12068154 | Method of forming a nitrogen-containing carbon film and system for performing the method | Yoshiyuki Kikuchi | 2024-08-20 |
| 11993849 | Carbon hard mask, film forming apparatus, and film forming method | Masaru Hori, Makoto Sekine, Tsuyoshi Moriya, Satoshi Tanaka, Yoshinori Morisada | 2024-05-28 |