Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12125700 | Method of forming high aspect ratio features | Mitsuya Utsuno, Hirotsugu Sugiura | 2024-10-22 |
| 12040177 | Methods for forming a laminate film by cyclical plasma-enhanced deposition processes | — | 2024-07-16 |