Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12129548 | Method of forming structures using a neutral beam | Tomohiro Kubota, Toshihisa Nozawa, Seiji Samukawa, Hua Chen | 2024-10-29 |
| 12125700 | Method of forming high aspect ratio features | Hirotsugu Sugiura, Yoshio Susa | 2024-10-22 |