Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12129548 | Method of forming structures using a neutral beam | Tomohiro Kubota, Mitsuya Utsuno, Seiji Samukawa, Hua Chen | 2024-10-29 |
| 11929251 | Substrate processing apparatus having electrostatic chuck and substrate processing method | — | 2024-03-12 |
| 11908684 | Method of forming an electronic structure using reforming gas, system for performing the method, and structure formed using the method | Shinya Yoshimoto, Jun Yoshikawa | 2024-02-20 |