Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11993849 | Carbon hard mask, film forming apparatus, and film forming method | Masaru Hori, Hirotsugu Sugiura, Tsuyoshi Moriya, Satoshi Tanaka, Yoshinori Morisada | 2024-05-28 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11993849 | Carbon hard mask, film forming apparatus, and film forming method | Masaru Hori, Hirotsugu Sugiura, Tsuyoshi Moriya, Satoshi Tanaka, Yoshinori Morisada | 2024-05-28 |