Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12060635 | Hard mask, substrate processing method, and substrate processing apparatus | Tsuyoshi Moriya, Tadahiro Ishizaka | 2024-08-13 |
| 11993849 | Carbon hard mask, film forming apparatus, and film forming method | Masaru Hori, Makoto Sekine, Hirotsugu Sugiura, Tsuyoshi Moriya, Satoshi Tanaka | 2024-05-28 |