Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12060635 | Hard mask, substrate processing method, and substrate processing apparatus | Tsuyoshi Moriya, Yoshinori Morisada | 2024-08-13 |
| 11993841 | Substrate processing method and substrate processing apparatus | Masato Araki, Kohichi Satoh, Takashi Sakuma | 2024-05-28 |
| 11981992 | Method for forming RuSi film and substrate processing system | Naotaka Noro | 2024-05-14 |