Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11993841 | Substrate processing method and substrate processing apparatus | Kohichi Satoh, Tadahiro Ishizaka, Takashi Sakuma | 2024-05-28 |
| 11984319 | Substrate processing method and film forming system | Kensaku Narushima, Nagayasu Hiramatsu, Takanobu HOTTA, Atsushi Matsumoto, Hideaki Yamasaki | 2024-05-14 |