Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11984319 | Substrate processing method and film forming system | Nagayasu Hiramatsu, Takanobu HOTTA, Atsushi Matsumoto, Masato Araki, Hideaki Yamasaki | 2024-05-14 |
| 11873556 | Raw material supply apparatus and film forming apparatus | Tomohisa KIMOTO, Noriyuki Watanabe, Kouichi SEKIDO, Takuya KAWAGUCHI | 2024-01-16 |