Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11984319 | Substrate processing method and film forming system | Kensaku Narushima, Nagayasu Hiramatsu, Atsushi Matsumoto, Masato Araki, Hideaki Yamasaki | 2024-05-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11984319 | Substrate processing method and film forming system | Kensaku Narushima, Nagayasu Hiramatsu, Atsushi Matsumoto, Masato Araki, Hideaki Yamasaki | 2024-05-14 |