Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12020900 | Plasma processing device, and plasma processing method | Munehito KAGAYA, Satoru Kawakami, Tsuyoshi Moriya, Tatsuo Matsudo, Hiroyuki Onoda | 2024-06-25 |
| 11935727 | Substrate processing method | Chishio Koshimizu | 2024-03-19 |