Issued Patents 2024
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12183929 | Energy storage device and method for manufacturing the same | Hironori AIDA, Koki MAEDA, Yudai Kato | 2024-12-31 |
| 12148637 | Substrate processing apparatus | Kiyoshi Mori | 2024-11-19 |
| 12051564 | Shower plate, plasma processing apparatus and plasma processing method | Taro Ikeda, Masaki Hirayama | 2024-07-30 |
| 12046455 | Shower plate, lower dielectric member and plasma processing apparatus | Atsushi Kubo, Taro Ikeda | 2024-07-23 |
| 12020900 | Plasma processing device, and plasma processing method | Munehito KAGAYA, Tsuyoshi Moriya, Tatsuo Matsudo, Jun Yamawaku, Hiroyuki Onoda | 2024-06-25 |
| 11929234 | Plasma processing apparatus and lower stage | Taro Ikeda, Sumi Tanaka, Masaki Hirayama | 2024-03-12 |
| 11923170 | Plasma processing apparatus and plasma processing method | Hiroyuki Yamamoto, Taro Ikeda, Masaki Hirayama | 2024-03-05 |