Issued Patents 2024
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12119212 | Wafer support device | Tetsuro ITAGAKI | 2024-10-15 |
| 12087552 | Plasma processing apparatus and plasma processing method | — | 2024-09-10 |
| 12051564 | Shower plate, plasma processing apparatus and plasma processing method | Taro Ikeda, Satoru Kawakami | 2024-07-30 |
| 11990316 | Plasma processing apparatus and plasma processing method | — | 2024-05-21 |
| 11929234 | Plasma processing apparatus and lower stage | Taro Ikeda, Sumi Tanaka, Satoru Kawakami | 2024-03-12 |
| 11923170 | Plasma processing apparatus and plasma processing method | Satoru Kawakami, Hiroyuki Yamamoto, Taro Ikeda | 2024-03-05 |