Issued Patents 2024
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12165846 | Plasma processing apparatus and plasma processing method | Eiki KAMATA, Haruhiko Furuya | 2024-12-10 |
| 12068208 | Plasma processing apparatus and control method | Yuki Osada | 2024-08-20 |
| 12051564 | Shower plate, plasma processing apparatus and plasma processing method | Satoru Kawakami, Masaki Hirayama | 2024-07-30 |
| 12046453 | Plasma processing apparatus | Atsushi Kubo, Eiki KAMATA, Nobuhiko Yamamoto | 2024-07-23 |
| 12046455 | Shower plate, lower dielectric member and plasma processing apparatus | Satoru Kawakami, Atsushi Kubo | 2024-07-23 |
| 11967485 | Plasma processing apparatus and plasma processing method | Eiki KAMATA, Mikio Sato, Nobuhiko Yamamoto | 2024-04-23 |
| 11929234 | Plasma processing apparatus and lower stage | Sumi Tanaka, Satoru Kawakami, Masaki Hirayama | 2024-03-12 |
| 11923170 | Plasma processing apparatus and plasma processing method | Satoru Kawakami, Hiroyuki Yamamoto, Masaki Hirayama | 2024-03-05 |
| 11908663 | Plasma processing apparatus | Toshifumi KITAHARA | 2024-02-20 |
| 11887825 | Control method and plasma processing apparatus | Mikio Sato, Eiki KAMATA | 2024-01-30 |