Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12076879 | Method of processing workpiece | Yoshimasa Kojima | 2024-09-03 |
| 12046453 | Plasma processing apparatus | Taro Ikeda, Eiki KAMATA, Nobuhiko Yamamoto | 2024-07-23 |
| 12046455 | Shower plate, lower dielectric member and plasma processing apparatus | Satoru Kawakami, Taro Ikeda | 2024-07-23 |