EK

Eiki KAMATA

TL Tokyo Electron Limited: 4 patents #43 of 870Top 5%
📍 Yamanashi, JP: #9 of 249 inventorsTop 4%
Overall (2024): #53,640 of 561,600Top 10%
4
Patents 2024

Issued Patents 2024

Showing 1–4 of 4 patents

Patent #TitleCo-InventorsDate
12165846 Plasma processing apparatus and plasma processing method Taro Ikeda, Haruhiko Furuya 2024-12-10
12046453 Plasma processing apparatus Taro Ikeda, Atsushi Kubo, Nobuhiko Yamamoto 2024-07-23
11967485 Plasma processing apparatus and plasma processing method Taro Ikeda, Mikio Sato, Nobuhiko Yamamoto 2024-04-23
11887825 Control method and plasma processing apparatus Mikio Sato, Taro Ikeda 2024-01-30