HF

Haruhiko Furuya

TL Tokyo Electron Limited: 1 patents #284 of 870Top 35%
Overall (2024): #451,922 of 561,600Top 85%
1
Patents 2024

Issued Patents 2024

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
12165846 Plasma processing apparatus and plasma processing method Eiki KAMATA, Taro Ikeda 2024-12-10