Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12094694 | Substrate processing apparatus and substrate processing method | Tamihiro Kobayashi | 2024-09-17 |
| 11929234 | Plasma processing apparatus and lower stage | Taro Ikeda, Satoru Kawakami, Masaki Hirayama | 2024-03-12 |