Issued Patents 2024
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12183603 | Processing module and processing method | Takayuki Yamagishi | 2024-12-31 |
| 12165908 | Vacuum processing apparatus and method of controlling vacuum processing apparatus | — | 2024-12-10 |
| 12148637 | Substrate processing apparatus | Satoru Kawakami | 2024-11-19 |
| 12130075 | Refrigerator comprising a dielectric heating mechanism | Kei Nambu, Tsuyoki Hirai | 2024-10-29 |
| 12080523 | Vacuum processing apparatus and method for controlling vacuum processing apparatus | — | 2024-09-03 |
| 12068662 | Rotary mechanism and substrate processing apparatus | — | 2024-08-20 |
| 11933537 | Refrigerator | Kei Nambu, Tsuyoki Hirai | 2024-03-19 |